Microsensors, MEMS, and Smart Devices

Microsensors, MEMS, and Smart Devices

Varadan, Vijay K.; Gardner, Julian W.; Awadelkarim, Osama O.

John Wiley & Sons Inc

11/2001

522

Dura

Inglês

9780471861096

15 a 20 dias

984

Descrição não disponível.

Introduction

Electronic Materials and Processing

MEMS Materials and their Preparation

Standard Microelectronic Technologies

Silicon Micromachining:Bulk

Silicon Micromachining: Surface

Microstereolithography for MEMS

Microsensors

Introduction to SAW Devices

Surface Acoustic Waves in Solids

IDT Microsensor Parameter Measurement

IDT Microsensor Fabrication

IDT Microsensors

MEMS-IDT Microsensors

Smart Sensors and MEMS

Appendices

Index

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microelectromechanical; semiconductor industry; microsensors; combines; circuitry; microelectronic; development; field; electronic; emergent; intelligent; nose; applications; microsensor; overview; complete; successful; reference; application