Microstereolithography and other Fabrication Techniques for 3D MEMS
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Microstereolithography and other Fabrication Techniques for 3D MEMS
Varadan, V. V.; Varadan, Vijay K.; Jiang, Xiaoning
John Wiley & Sons Inc
01/2001
274
Dura
Inglês
9780471521853
15 a 20 dias
552
Descrição não disponível.
Preface.
Microelectromechanical Systems.
Fundamentals of Polymer Synthesis for MEMS.
Stereolithography (SL).
Microstereolithography Techniques I-Scanning Method.
Microstereolithography Techniques II-Projection Method.
Polymeric MEMS Architecture with Silicon, Metal, and Ceramics.
Combined Silicon and Polymeric Structures.
Micromolding.
Applications.
Appendix 1: Some Polymers for MEMS.
Appendix 2: An Example of CAD Model and NC Codes for Microstereolithography.
Index.
Microelectromechanical Systems.
Fundamentals of Polymer Synthesis for MEMS.
Stereolithography (SL).
Microstereolithography Techniques I-Scanning Method.
Microstereolithography Techniques II-Projection Method.
Polymeric MEMS Architecture with Silicon, Metal, and Ceramics.
Combined Silicon and Polymeric Structures.
Micromolding.
Applications.
Appendix 1: Some Polymers for MEMS.
Appendix 2: An Example of CAD Model and NC Codes for Microstereolithography.
Index.
Este título pertence ao(s) assunto(s) indicados(s). Para ver outros títulos clique no assunto desejado.
mems; application; fields; diverse; microsensors; systems; microelectromechanical; intelligent; wireless communication; biomedical engineering; microstereolithography; work; timely; stateoftheart microfabrication techniques; microstructures
Preface.
Microelectromechanical Systems.
Fundamentals of Polymer Synthesis for MEMS.
Stereolithography (SL).
Microstereolithography Techniques I-Scanning Method.
Microstereolithography Techniques II-Projection Method.
Polymeric MEMS Architecture with Silicon, Metal, and Ceramics.
Combined Silicon and Polymeric Structures.
Micromolding.
Applications.
Appendix 1: Some Polymers for MEMS.
Appendix 2: An Example of CAD Model and NC Codes for Microstereolithography.
Index.
Microelectromechanical Systems.
Fundamentals of Polymer Synthesis for MEMS.
Stereolithography (SL).
Microstereolithography Techniques I-Scanning Method.
Microstereolithography Techniques II-Projection Method.
Polymeric MEMS Architecture with Silicon, Metal, and Ceramics.
Combined Silicon and Polymeric Structures.
Micromolding.
Applications.
Appendix 1: Some Polymers for MEMS.
Appendix 2: An Example of CAD Model and NC Codes for Microstereolithography.
Index.
Este título pertence ao(s) assunto(s) indicados(s). Para ver outros títulos clique no assunto desejado.
